Absolute tests of three flats for interferometer with 800 mm aperture.

Abstract

In this study, absolute tests of three flats were performed by using an 800 mm Fizeau interferometer. The flats were installed by employing double-wedge rubber, and the deformation of the flats, primarily involving power and spherical aberrations, was analyzed by conducting finite element analysis. The measurement results revealed an astigmatism component that did not follow the rotation. The astigmatism was separated from the measurement result, and the remaining aberration was consistent with the simulation results, confirming that the astigmatism deformation did not originate from the rubber installation. Subsequently, an absolute test of an 800 mm flat was completed, and the results were compared with those of the traditional three-flat absolute test and Zygo interferometer. The directions of the vertical diameter lines were consistent. The peak-to-valley difference in the full-surface shape was less than 4 nm, and the root mean square was less than 1 nm. The surface errors of flats A and C were consistent with the result of replacing the reference flat, B, with the fourth flat, D, to perform an absolute test. The difference between flats A and C was similar to Zygo's results, thus eliminating the influence of the transmission flat. These results verified the accuracy of the results.