Abstract
The coplanar microscale atmospheric pressure plasma jet (μ-APPJ) is a capacitively coupled radio frequency discharge (13.56 MHz, ∼15 W rf power) designed for optimized optical diagnostic access. It is operated in a homogeneous glow mode with a noble gas flow (1.4 slm He) containing a small admixture of molecular oxygen (∼0.5%). Ground state atomic oxygen densities in the effluent up to 2 × 1014 cm−3 are measured by two-photon absorption laser-induced fluorescence spectroscopy (TALIF) providing space resolved density maps. The quantitative calibration of the TALIF setup is performed by comparative measurements with xenon. A maximum of the atomic oxygen density is observed for 0.6% molecular oxygen admixture. Furthermore, an increase in the rf power up to about 15 W (depending on gas flow and mixture) leads to an increase in the effluent's atomic oxygen density, then reaching a constant level for higher powers.
Published Version
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