Abstract
The influence of the main process-dependent parameters characterizing the abrasive blasting of singlecrystal silicon substrates on the treatment efficiency, surface quality, and microrelief properties is investigated experimentally. The optimal treatment parameters are experimentally selected so that the required microrelief is formed when substrates are prepared for thermal migration of the linear zones of a solvent.
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More From: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
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