Abstract
This study introduces a differential algebra (DA) method to the high-order aberration analysis of a multi-offset cylindrical lens. The axial field functions (AFF) of harmonic field components for a cylindrical lens are interpolated into an analytic expression using a Gaussian wavelet, which can be transferred into DA arguments and can be operated as per DA methodology. The tracing of one reference ray can enable the high-order aberration coefficients of the multi-offset cylindrical lens to be obtained. As an example, a monochromator (MC) with a multi-offset cylindrical lens is computed, and up to third rank aberration coefficients are obtained using the developed DA method. The software has been developed and tested extensively.
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