Abstract
A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be completely gastight. The wireless data is obtained with a reader antenna by mutual inductance coupling. Experimental systems are designed to obtain the frequency-pressure characteristic, frequency-temperature characteristic and coupling distance. Experimental results show that the sensor can be coupled with an antenna at 600 °C and max distance of 2.8 cm at room temperature. The senor sensitivity is about 860 Hz/bar and hysteresis error and repeatability error are quite low.
Highlights
Nowadays, high temperature pressure sensors has been attached great importance due to their excellent work capability in harsh temperature environments such as in automobiles [1], aero engine turbines [2], aeronautics [3] and is one of the important areas in the sensor research [4]
The non-contact measurement technology and high-temperature co-fired ceramics (HTCC) material are involved to solve the problem of lead degradation and elastic properties deterioration of materials at ultra-high temperature, respectively [19].The sensor in this article does not have evacuation channel and exit hole in order to ensure the sensor is completely gastight in harsh environments
The presented resonant pressure sensor applying standard HTCC technology is realized with a passive LC circuit
Summary
Qiulin Tan 1,2, Hao Kang 1,2, Jijun Xiong 1,2,*, Li Qin 1,2, Wendong Zhang 1,2, Chen Li 1,2, Liqiong Ding 1,2, Xiansheng Zhang 1,2 and Mingliang Yang 1,2. Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
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