Abstract

A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology. The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor. The inductor and capacitor were fabricated by screen-printing. Pressure measurement is tested using a wireless mutual inductance coupling method. The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar. Experimental results show that the sensor can be read out wirelessly by external antenna at 600°C. The max readout distance is 3 cm at room temperature. The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.

Highlights

  • Passive wireless sensor has characteristics of having no batteries and contactless signal readout and nonpollution, which make it have extensive application prospects in many fields, such as high-temperature measurement, hermetic space, and rotating components

  • Passivewireless pressure measurement in harsh environments such as high temperatures has become increasingly critical in automotive, aerospace, and industrial applications [1,2,3]

  • This paper proposes a passive wireless sensor for remote pressure monitoring in high-temperature environment and can be used for environment with hazardous gas

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Summary

Introduction

Passive wireless sensor has characteristics of having no batteries and contactless signal readout and nonpollution, which make it have extensive application prospects in many fields, such as high-temperature measurement, hermetic space, and rotating components. Passivewireless pressure measurement in harsh environments such as high temperatures has become increasingly critical in automotive, aerospace, and industrial applications [1,2,3]. This paper proposes a passive wireless sensor for remote pressure monitoring in high-temperature environment and can be used for environment with hazardous gas. It consists of a fixed inductor and variable capacitor. The proposed pressure sensors are totally passive, which means that there are no batteries and the possibility for the occurrence of electric spark is eliminated, which is critical for the hazardous gas environment. The novel pressure sensor realized in LTCC technology can work at temperatures from 400 to 600∘C. It is expected to wirelessly measure pressure up to 600∘C and last up to 30 minutes

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