Abstract
In this paper several 3D numerical approaches are used to provide an estimate of the damping coefficient for complex MEMS starting from atmospheric pressure down to the free-molecule regime. While at standard conditions (p~1 bar), continuum-based methods with slip boundary conditions are adopted, in the free molecule regime two different techniques are compared: a classical Test Particle Monte Carlo method and a Boundary Integral Equation approach. It is shown that, for the class of applications at hand, the results obtained in these two regimes combined with simple bridging formulas can provide a reliable estimate of the damping coefficient in the whole range of possible working pressures.
Published Version
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