Abstract
Microlens array combined with CMOS sensors have recently been the subject of intensive research due to their ability to significantly enhance imaging sensitivity. However, existing microlens arrays suffer from a limited field-of-view, necessitating complex lens assemblies that increase system cost, size and weight. In this study, we present a novel approach utilizing a single layer metalens array composed of low loss and high-index α-Si materials. The metalens array was designed using a phase compensation method to efficiently focus conical light with arbitrary cone angles onto the center pixels of the CMOS sensor. Theoretical analysis demonstrates that the metalens is capable of focusing ± 20° conical light with an impressive efficiency of 83.6 %, which can be extended to arbitrary cone angles. Experimental results reveal a measured focusing efficiency of 73 % under an incidence angle of ± 8.3° for conical light, representing an improvement of 8 % compared to parallel light incidence. This research presents a promising solution for wide-field-of-view metalens arrays in integrated CMOS imaging systems.
Published Version
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