Abstract
A combined scanning probe microscope has been developed that allows simultaneous operation as a non-contact/tapping mode atomic force microscope, a scattering near-field optical microscope, and a scanning tunnelling microscope on conductive samples. The instrument is based on a commercial optical microscope. It operates with etched tungsten tips and exploits a tuning fork detection system for tip/sample distance control. The system has been tested on a p-doped silicon substrate with aluminium depositions, being able to discriminate the two materials by the electrical and optical images with a lateral resolution of 130 nm.
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