Abstract
In advanced technology nodes, layout decomposition and mask optimization are two key stages in integrated circuit design. Due to the inconsistency of the objectives of these two stages, the performance of conventional layout and mask optimization may be suboptimal. To tackle this problem, in this paper we propose a unified framework, which seamlessly integrates layout decomposition and mask optimization. We propose a gradient based approach to solve the unified mathematical formulation, as well as a set of discrete optimization techniques to avoid being stuck in local optimum. The conventional optimization process can be accelerated as some inferior decompositions can be smartly pruned in early stages. The experimental results show that the proposed unified framework can achieve more than 17 x speed-up compared with the conventional two-stage flow, meanwhile it can reduce EPE violations by 18%, and thus maintain better design quality.
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