A two-dimensional silicon-on-glass actuator with dispensed polymer microlens

Abstract

Significant advances in the technical capabilities of microlens actuators for optical pickups have been achieved using MEMS technology, enabling miniaturization and integration of optical data storage systems. In this work, a new type of compact silicon-on-glass (SOG) actuator for two-dimensional (2-D) positioning of a dispensed polymer microlens is developed by MEMS technology. A wafer-level process for fabrication of the SOG actuator is achieved using anodic bonding of a pyrex wafer and an ultra-thin silicon wafer. Dispensed polymer microlenses are subsequently integrated onto the 2-D actuator. Typical displacements of about ±28.6μm in tracking direction and 3.2μm in focusing direction are experimentally characterized. The compact 2-D SOG actuator can simplify the assembly and expand the application area for the optical pickup system.