Abstract
The microstructure and interface structure of Ti–N coating deposited by hollow cathode discharge ion plating were investigated with transmission electron microscopy and other methods of microanalysis. A layered structure of the coating was observed, consisting of substrate–FeTi–Ti–Ti2N–TiN. The transition layers FeTi and Ti2N were identified with microbeam electron diffraction. It was also shown that there was a microcrystalline region at the substrate surface. Preferential orientation has been observed and correlated with deposition parameters. The orientation relationships between different layers have been determined. The formation mechanism of transition layers was discussed.
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