Abstract
A three-dimensional finite element model of an experimental near-field scanning microwave microscope (NSMM) has been developed and compared to experiment on non conducting samples. The microwave reflection coefficient S11 is calculated as a function of frequency with no adjustable parameters. There is qualitative agreement with experiment in that the resonant frequency can show a sizable increase with sample dielectric constant; a result that is not obtained with a two-dimensional model. The most realistic model shows a semi-quantitative agreement with experiment. The effect of different sample thicknesses and varying tip sample distances is investigated numerically and shown to effect NSMM performance in a way consistent with experiment. Visualization of the electric field indicates that the field is primarily determined by the shape of the coupling hooks.
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