Abstract
Microbeams with variable cross-section have been applied in Microelectromechanical Systems (MEMS) resonators. Quality factor (Q-factor) is an important factor evaluating the performance of MEMS resonators, and high Q-factor stands for the excellent performance. Thermoelastic damping (TED), which has been verified as a fundamental energy lost mechanism for microresonators, determines the upper limit of Q-factor. TED can be calculated by the Zener’s model and Lifshits and Roukes (LR) model. However, for microbeam resonators with variable cross-sections, these two models become invalid in some cases. In this work, we derived the TED model for cone microcantilever with circular cross-section that is a representative non-uniform microbeam. The comparison of results obtained by the present model and Finite Element Method (FEM) model proves that the present model is valid for predicting TED value for cone microcantilever with circular cross-section. The results suggest that the first-order natural frequencies and TED values of cone microcantilever are larger than those of uniform microbeam for large aspect ratios (l/r0). In addition, the Debye peak value of a uniform microcantilever is equal to 0.5ΔE, while that of cone microcantilever is about 0.438ΔE.
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