Abstract

We have developed a model of liquid metal ion source (LMIS) operation which gives a consistent picture of three different aspects of LMI sources: (i) the shape and size of the ion emitting region; (ii) the mechanism of ion formation; (iii) properties of the ion beam such as angular intensity and energy spread. We find that the emitting region takes the shape of a jet-like protrusion on the end of a Taylor cone with ion emission from an area only a few tens of Å across, in agreement with recent TEM pictures by Sudraud. This is consistent with ion formation predominantly by field evaporation. Calculated angular intensities and current-voltage characteristics based on our fluid dynamic jet-like protrusion model agree well with experiment. The formation of doubly charged ions is attributed to post-ionization of field evaporated singly charged ions and we calculate an apex field strength of about 2.0 V Å −1 for a Ga source. The ion energy spread is mainly due to space charge effects, it is known to be reduced for doubly charged ions in agreement with this post-ionization mechanism.

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