A test structure advisor and a coupled, library-based test structure layout and testing environment

Abstract

A new test chip design environment, based on commercial tools, containing a test structure advisor and a coupled, library-based layout and testing environment has been developed that dramatically increases productivity. The test structure advisor analyzes cross sections of devices to recommend a comprehensive list of diagnostic and parametric test structures. These test structures can then be retrieved from the libraries of parameterized structures, customized, and placed in a design to rapidly generate customized test chips. Coupling of the layout and test environments enables the automatic generation of the vast majority of the parametric test software. This environment, which has been used to design test chips for a low-power/low-voltage CMOS process, a BiCMOS trench process, and a TFT process, results in an estimated tenfold increase in productivity. In addition, the redesign of five modules of Stanford's existing BiCMOS test chip, using parameterized test structures, showed an 8/spl times/ improvement in layout time alone.