Abstract
Single crystal substrates of two kinds of metal (nickel and copper), which were selected because there was great difference between them on solid solubility for carbon, were implanted with 3.0MeV carbon to reveal the mechanism of metal surface hardening by ion implantation. The surface hardening mechanism was studied on the basis of an actual measurement of the crystalline structure changing which were analyzed with Rutherford backscattering spectroscopy (RBS) and transmission electron microscopy (TEM).
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