Abstract
In this paper, we experimentally demonstrated the oblique angle deposition silicon dioxide nanorods as good anti-reflection coating materials. The nanostructures morphologies and the optical properties were characterized by field-emission scanning electron microscopy and transmission electron microscopy. The influence of the OAD on the optical property of the SiO2 dense and SiO2 nanorods film were investigated by the spectral transmission measurement in 200-1200 nm wavelength regimes. The angle-dependent transmission from 0° to 45° incident angles results demonstrate that increased transmittance through the SiO2 nanosrods surface compared to that of the SiO2 films coated glass. The SiO2 nanorods with 800 nm-thick have transmission closed to the SiO2 film and glass substrate. In addition, the high transmission was observed for angles of incidence up to 45°. The SiO2 nanorods array makes this omnidirectional antireflection concept easily applicable to a wide range of devices.
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