A study of the micro-machining process on quartz crystals using an abrasive slurry jet

Abstract

An investigation of the micro-channelling process on a quartz crystal using an abrasive slurry jet is presented. An experimental study is conducted first to understand the material removal process, surface quality as well as the effect of process parameters on the channelling performance, namely the material removal rate, channel depth, top channel width and channel wall inclination angle. It is found that a good micro-channel top edge appearance and bottom surface finish can be produced on quartz crystal by employing smaller particles with a relatively small jet impact angle, but at the sacrifice of material removal rate. Predictive models for material removal rate and micro-channel depth are then developed using a combination of the dimensional analysis method and the particle impact erosion theories, where the squeeze film effect on the impact erosion is considered. The models are verified experimentally and it is found that the model predictions are in good agreement with the corresponding experimental data.