Abstract
Abstract Roll to roll (R2R) UV micro-imprinting lithography was investigated by both experimental and numerical methods. A maximum imprinting velocity without bubble defects was found through experiments and numerical simulations. This velocity changes while the imprinting processes were conducted without cleaning the imprinting roll. The processes of resin filling into patterned cavities were simulated at various resin viscosities, contact angles of resin on substrate and on the roller. The predicted velocity showed a good agreement with experimental measurement. The results indicated that a larger imprinting velocity can be used with lower viscosity resin. It also showed that bubble trapping was affected by the contact angles between resin and mold (substrate). Finally, the influences of pattern aspect ratio in the filling processes were also studied.
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