A Study of Non-Uniform SPST RF-MEMS Switch under the Effect of Squeeze Film Damping

Abstract

This work presents a practical technique that can be used to construct the dynamic model of any RF MEMS switch regardless of its shape. The presented technique also allows for inclusion of squeeze film effect in the model without resorting to complex mathematical development of the latter. The technique utilizes Finite element methods to determine mode shapes and natural frequencies of the switch. A modal-model is then constructed from the FEA results. The model can be reduced using by retaining modes with highest Hankel norm modes to reduce calculations effort associated with large models. Simulation results have shown that the proposed model has merit and agrees with published experimental data.