A study of crystallographic phases in non-stoichiometric (oxygen deficiency) indium oxide thin films

Abstract

Indium oxide is a well-known transparent conductive oxide (TCO) in its stoichiometric composition (In2O3). Its electrical and optical properties are strongly influenced by the chemical composition. This work focuses on an experimental investigation of the crystallographic phases in non-stoichiometric (oxygen deficiency) compositions of indium oxide thin films. The thin films were deposited at 300 °C by reactive sputtering of pure indium target at different oxygen gas flow rates on Si substrates. Two different phases are identified only in the non-stoichiometric compositions: metallic indium- and crystalline indium-rich oxide. The metallic indium phase appears as nano-crystals, a few nano-meters in diameter, evenly dispersed and occupies only 1 vol. % of the film. These metallic nano-particles have a negligible effect on the optical transparency and electrical conductivity of the films. The indium-rich oxide (InxOy) phase which occupies about 99 vol. % of the film has the bixbyite crystallographic structure and average grain size of about 50 nm. This phase has a pronounced effect on improving the TCO figure-of-merit (FM) relative to stoichiometric crystalline In2O3 films due to a higher increase of the electrical conductivity than the decrease of the optical transparency.