Abstract
The Si(111)-Ag system was investigated by a new experimental technique for chemical analysis of solid surfaces, called total reflection angle X-ray spectroscopy in RHEED experiments (RHEED-TRAXS). By applying this method to the isothermal condensation and desorption experiments of Ag atoms, saturation coverages of surface structures and desorption energies of Ag atoms could be measured. The sticking probability and the desorption rate of Ag atoms can be directly measured in principle by the RHEED-TRAXS experiment, which is generally difficult by AES. By comparing the experimental results with those of AES, the features of the X-ray spectroscopy are discussed
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