Abstract
Significant progress on the use of MEMS cantilever sensors to detect the various diseases has surveyed. The Cantilever made in the micrometer size provides an opening to develop a highly sensitive sensor. It detects the biological molecules, chemicals, diseases and explosives. MEMS cantilevers can be produced in abundance at low cost with the material like Silicon, Silicon Nitride and Polymers. This paper has summarized various cantilevers for different diseases into a tabular form. This will enable the researchers to pick up genuine cantilever for right disease by choosing different materials, size and shape. And also it addresses various read out techniques used to detect the different diseases.
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