Abstract
We present a stacked temperature, pressure, and localization platform, targeted for minimally invasive surgical and diagnostic applications under Magnetic Resonance Imaging. The platform comprises a micro-fabricated three-layer (Titanium-Parylene-Titanium) membrane pressure sensor, a Gallium Arsenide band-gap temperature sensor, and a magnetic material on double prism retro-reflector that benefits from Magneto-Optic Kerr effect as a magnetic field sensor, to provide localization feedback under Magnetic Resonance Imaging. All sensors can be addressed with a single fiber optic cable, where the collected light is directed to a spectrometer and a polarimeter. For the three-layer microfabricated membrane sensor, an analytical formulation is derived, linking the pressure to optical intensity. Moreover, finite-element simulation results are provided, verifying analytical findings. Wavelength division multiplexing is exploited to address the sensors simultaneously. We measured sensitivities of 0.025 millidegree/Gauss rotation of polarization, 1.5 nm/mmHg displacement (in agreement with simulation results and analytical findings), 0.36 nm/°C bandgap wavelength shift for magnetic field, pressure, and temperature sensors; respectively. With further development, the proposed device can be adapted to a clinical setting for use in Magnetic Resonance assisted surgical procedures.
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