Abstract

High-quality aluminum nitride (AlN) crystals are the key material for the development of high-performance solid-state solar-blind vacuum-ultraviolet (VUV) photodetectors. However, the commonly used epitaxial method to grow AlN crystals would limit this development due to the existence of indispensable substrates. This study addresses this issue using free-standing lamellar AlN single crystals that are grown using the physical vapor transport method. The large lateral dimension of the crystal enables the construction of an Au-AlN-graphene van der Waals heterojunction, which can function as a vertical VUV photodetector with the graphene serving as the light window. The asymmetric junctions formed on the two sides of the crystal and the limited penetration of the VUV endow the device with a bias polarity-dependent photoresponse feature arising from different photoelectric processes. Furthermore, the device demonstrates a high responsivity of 5.77 A W−1 and a high specific detectivity of 1.71 × 1013 cm Hz1/2 W−1 under the illumination of a 193 nm laser. The high crystallinity of the AlN guarantees a high spectral selectivity of responsivity with a 193 nm/280 nm rejection ratio of 3 × 102. This work would inspire the development of wide-bandgap-semiconductor-based VUV photodetectors in terms of methodology and mechanism.

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