Abstract
We experimentally demonstrate a spectrometer, which consists of an arrayed waveguide grating (AWG), tunable microring resonator (MRR) array, and waveguide-coupled Ge-on-Si photodetector, all integrated onto a single chip. The spectrometer achieves high resolution (0.1 ± 0.029 nm) and large bandwidth (25.4 nm) in 9 channels with a small footprint of $3 \times 3 \text{ mm}^2$ . It has high potential to enable a high-performance spectrometer for applications such as environmental monitoring, spectroscopy, biological and chemical sensing, etc.
Highlights
On-chip spectrometer has critical impact on a wide range of applications such as environmental monitoring, spectroscopy, biological and chemical sensing, astronomy [1]–[7], etc
titanium nitride (TiN) is formed as a resistive layer for heaters
A tunable microring resonator array-based spectrometer is experimentally demonstrated, which is integrated with the arrayed waveguide grating and waveguide-coupled Ge-on-Si photodetector array onto a single chip
Summary
On-chip spectrometer has critical impact on a wide range of applications such as environmental monitoring, spectroscopy, biological and chemical sensing, astronomy [1]–[7], etc. On-chip FT spectrometer can deliver large bandwidth and high signalto-noise ratio (SNR). FT spectrometer probing temporal interferogram requires only one detection channel, but it remains a challenge to achieve high resolution either due to limited optical path difference [19], [20] or under-sampling [21]. FT spectrometer detecting spatial interferogram [22]–[30] requires large number of detection channels to realize high resolution, degrading SNR. Other on-chip spectrometers reconstruct light by employing dispersive elements or tunable filters such as arrayed waveguide gratings (AWG) [5], [7], [8], [31]–[34], planar concave grating (PCG) [12], [34], [35], random structures [36]
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