Abstract
A time- and cost-effective fabrication process for uniformly well-ordered anodic alumina templates was newly suggested. Pre-textured nanopatterns on aluminum sheets as the pore initiation site were fabricated by using soft lithographic methods and selective inductively coupled plasma etching. Then, only a one-step anodization was performed for the preparation of a regular nanoporous alumina template. As a result, a well-ordered nanoporous alumina template was prepared with an obvious barrier layer on the aluminum substrate. Especially, this type of innovative fabrication strategy can be easily generalized to facilitate other valve metal anodization processes.
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