Abstract
A simple hollow probe has been developed for monitoring ion-beam energy in various processing plasmas. The hollow probe consists of an insulated tube and a movable tungsten rod which is biased by a dc voltage. Two knees on the current–voltage characteristics of the hollow probe are detected when the ion beam injects in the hollow probe in a low-pressure double-plasma device. Its mechanism is also discussed by the Langmuir probe theory. It is found that the potential difference between the hollow-probe voltages corresponding to the two knees is in good agreement with the ion-beam energy measured by the conventional ion retarding energy analyzer. The spread angle of the ion beam in the double-plasma device is discussed with the hollow probe and the directional ion energy analyzer.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
