Abstract
Ion collection by a hollow probe has been studied in electron cyclotron resonance (ECR) microwave plasma under a divergent magnetic field where an ion beam was accelerated along the plasma axis. The ion current collected by the probe was found to consist of currents proportional to the geometric solid angle from the probe collector caused by the ion beam parallel to the probe axis. The effect of the ion beam energy and its injection angle to the probe has been also discussed.
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