Abstract
Based on the elastic analysis of structures, a simple approach to calculating the driving force for polysilicon laterally driven thermal microactuators is presented by using their deflection. The driving force obtained through the deflection is compared with available results measured by force testers fabricated on the same substrate as the microactuators. Reasonable agreement has been achieved. The approach allows one to predict the driving force for the microactuators as their deflection is designed.
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