Abstract
The design and realization of a simple and reliable convertiblediode/magnetron deposition system allowing the in situ production ofboth high-Tc superconducting oxide films and low-Tc superconductingmetallic films is presented. The ability to produce high-quality double-sidedin situ films with uniform characteristics over 2'' diameter targetsis demonstrated. This apparatus can represent a valid alternative to moresophisticated, less flexible deposition systems and is well suited forapplication in the large-scale production of superconducting filters forwireless communications.
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