Abstract
A sensitive diaphragm-type pressure transducer suitable for use at very low temperatures is described. The device is useful over the differential pressure range of −200–+200 Torr at ambient pressures up to 20 atm. Differential pressure deflects the prestressed diaphragm causing a change in capacitance between a gold layer on the diaphragm and a fixed plate. The transducer can easily resolve changes of 10−3 Torr in pressure. The method of constructing the device is described in detail.
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