A Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Hollow Hemisphere Dielectric Layer

Abstract

Capacitive pressure sensors based on porous structures have been widely researched and applied to a variety of practical applications. To date, it remains a big challenge to develop a capacitive pressure sensor with a high sensitivity and good linearity over a wide pressure range. In this paper, a sensitive, flexible, porous capacitive pressure sensor was designed and manufactured by means of the "salt template method" and man-made grooves. To this aim, the size of the salt particles used for forming pores/air voids, time taken for thorough dissolution of salt particles, and the depth of the man-made groove by a pin were taken into consideration to achieve a better effect. With pores and the groove, the sensor is more liable be compressed, which will result in a dramatic decrease in distance between the two electrodes and a conspicuous increase of the effective dielectric constant. The optimize-designed sensor represents a sensitivity 6-8 times more than the sensor without the groove in the pressure range of 0-10 kPa, not to mention the sensor without pores or the groove, and it can keep good linearity within the measurement range (0-50 kPa). Besides, the sensor shows a low detection limit of 3.5 Pa and a fast response speed (≈50 ms), which makes it possible to detect a tiny applied pressure immediately. The fabricated sensor can be applied to wearable devices to monitor finger and wrist bending, and it can be used in the object identification of mechanical claws and object cutting of mechanical arms, and so on.