Highly Sensitive and Flexible Capacitive Pressure Sensor Enhanced by Weaving of Pyramidal Concavities Staggered in Honeycomb Matrix

Abstract

Large scale production of highly sensitive and flexible pressure sensor has aroused widely interest for their high potential use in real-wearable electronics and e-textiles. In this work, a flexible and wearable capacitive pressure sensor has been fabricated based on the unique honeycomb weave architecture, conferring the sensor with an extreme synchronization between output capacitance and input pressure, as well as the high sensitivity of 0.045 kPa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> under 10 kPa, large workable pressure range of 40 kPa, good durability and stability over 1000 cycles, fast response time of 135 ms and comparable stability under diverse pressures. The sensor can be used for various pressure detections such as finger pressing, tape loading and handshaking. Moreover, the self-made sensor has good ability in monitoring spatial distribution, showing its promising application in flexible and wearable devices.