A segmented multi-loop antenna for selective excitation of azimuthal mode number in a helicon plasma source.

Abstract

A flat type, segmented multi-loop antenna was developed in the Tokai Helicon Device, built for producing high-density helicon plasma, with a diameter of 20 cm and an axial length of 100 cm. This antenna, composed of azimuthally splitting segments located on four different radial positions, i.e., r = 2.8, 4.8, 6.8, and 8.8 cm, can excite the azimuthal mode number m of 0, ±1, and ±2 by a proper choice of antenna feeder parts just on the rear side of the antenna. Power dependencies of the electron density ne were investigated with a radio frequency (rf) power less than 3 kW (excitation frequency ranged from 8 to 20 MHz) by the use of various types of antenna segments, and n(e) up to ~5 × 10(12) cm(-3) was obtained after the density jump from inductively coupled plasma to helicon discharges. Radial density profiles of m = 0 and ±1 modes with low and high rf powers were measured. For the cases of these modes after the density jump, the excited mode structures derived from the magnetic probe measurements were consistent with those expected from theory on helicon waves excited in the plasma.