A scintillator fabricated by solid-state diffusion bonding for high spatial resolution x-ray imaging

Abstract

Lens-coupled two-dimensional indirect X-ray detectors with thin-film scintillators are important for high spatial resolution X-ray imaging. To achieve high quality high-resolution images, we propose a novel fabrication method for thin-film scintillators based on solid-state diffusion bonding. Scintillators were successfully produced with thicknesses of 5, 10, and 20 μm, with a surface flatness better than λ/10. X-ray imaging performance with a point spread function of 8 μm FWHM was demonstrated with a prototype X-ray detector equipped with a 20-μm-thick scintillator, at an effective spatial sampling of 4 μm/pixel and a field of view of 2.56 x 1.92 mm2.At the request of all authors of the paper and with the agreement of the proceedings editors an updated version of this article was published on 1 September 2016. An older version of the paper was inadvertently supplied to AIP Publishing and the final version is now available.