Abstract
The use of a Fresnel zone plate and He(I) discharge to produce a 5 μm UV photon microprobe suitable for use in scanning photoelectron microscopy is described. The performance of a prototype microscope using total electron yield detection is shown to be in good agreement with theoretical considerations. The design and construction of a cylindrical mirror electron energy analyser suitable for use with the microscope is described and the use of this combination for small spot spectroscopy and energy resolved imaging is reported.
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