A safety system for gas source molecular beam epitaxy

Abstract

Gas source molecular beam epitaxy (GSMBE) is one of the newest developments in epitaxial growth technology wherein the group V sources such as arsine and phosphine are gaseous and in the form of hydrides, while the Group III sources such as indium, aluminum, gallium are all solids. However, the gases involved are very hazardous, extremely toxic, highly inflammable and explosive at elevated temperatures. Adequate care must be taken for the safe use of these gases so that this attractive technique can be properly utilized. This paper discusses the salient safety features of one such GSMBE system (installed in the Epicenter at the University of Illinois) consisting of a gas delivery system with its robust piping assembly, gas manifold and a scrubber. The system is integrated with a Multiple Point Toxic Gas Monitor (MPTGM) acting as the central alarm command system based on the concept of fail safe total safety. This alarm system is equipped with audio-visual alarms for a variety of monitored conditions and interlocks for automatic shutdown. A well-designed air flow pattern has been incorporated to provide good air quality in the laboratory and in the gas storage facility. Additionally a set of good laboratory practices ensured by administrative and personal control are instituted to reduce the hazards to an acceptable risk level.