Abstract
Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of microscale/nanoscale science, mechanical engineering, electronic engineering, and control engineering. Over the past two decades, it has been widely applied in the fields of MEMS (microelectromechanical systems), bioengineering, and microdevice integration and manufacturing. Microvision servoing is the basic tool for enabling the automatic and precise micromanipulation of microscale/nanoscale entities. However, there are still many problems surrounding microvision servoing in theory and the application of this technology’s micromanipulation processes. This paper summarizes the research, development status, and practical applications of critical components of microvision servoing for micromanipulation, including geometric calibration, autofocus techniques, depth information, and visual servoing control. Suggestions for guiding future innovation and development in this field are also provided in this review.
Highlights
Micromanipulation or microassembly techniques refer to the processing or manipulation of tiny objects, which are generally between millimeters and nanometers in size
MEMS [2,3], MOEMS [4], BioMEMS [5,6,7,8], and other similar microsystems are generated as a result of the multidisciplinary interactions between sensors, precision machining, biological engineering, microelectronics and precision measurement technologies
MEMS are considered to be made of multiple independent components, which can be manufactured by using different precision machining methods and different materials, and these components can be put together to create the required systems via microassembly or micromanipulation and used in different fields [20,21]
Summary
Micromanipulation or microassembly techniques refer to the processing or manipulation of tiny objects, which are generally between millimeters and nanometers in size They are mainly used in biological engineering, microdevice processing or assembly, medical engineering and other fields of fine operation [1]. MEMS (microelectromechanical systems) [2,3], MOEMS (micro-optoelectromechanical systems) [4], BioMEMS (biological microelectromechanical systems) [5,6,7,8], and other similar microsystems are generated as a result of the multidisciplinary interactions between sensors, precision machining, biological engineering, microelectronics and precision measurement technologies The objects of these systems have small volumes, weak structures, light weights and low rigidities, and the forces applied to them should not be too large. The integration of visual information will build a technical foundation for the automation and intelligence of the micromanipulation system It is of great significance for safe, stable and accurate operations of tiny objects
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