A Resonant Pressure Micro Sensor Based on Suspended Assembly

Abstract

This study presents a resonant pressure micro sensor which is suspended by springs in assembly. Pressures under measurement lead to intrinsic frequency shifts of two resonators, which are, however, prone to environmental disturbances. The suspended assembly proposed in this study can minimize the side effects of environmental noises and stabilize intrinsic frequencies of resonators. More specifically, in response to temperature variations, the fitting errors of the resonant pressure micro sensors with and without suspended assembly were quantified as −13 Pa and 788 Pa, respectively. In response to environmental vibrations, the measurement errors of the resonant pressure micro sensors were decreased from 24 Pa to 6 Pa with the help of the suspended assembly.