A Resonant Differential Pressure Microsensor With Temperature and Static Pressure Compensations

Abstract

This paper presents a resonant differential-pressure (DP) microsensor with temperature (T) and static-pressure (SP) compensations. In this microsensor, three resonators were positioned on and beside the pressure-sensitive diaphragm and the corresponding intrinsic frequencies were translated into differential pressure under the interferences of temperature and static pressure. Finite element simulation was conducted for device modeling, locating the relationship between the intrinsic resonant frequencies of three resonators and values of differential pressure, temperature and static pressure. Microfabrication (e.g., photolithography, deep reactive-ion etching and anodic bonding) was employed to manufacture the microsensor with key fabrication results displayed in this study. Experimental characterizations were conducted, which indicated that the maximum fitting error of the fabricated microsensor was deceased from 2145.7 Pa (before compensation) to 98.2 Pa (after compensation) under a differential-pressure range from 0 kPa to 100 kPa, a temperature range from 10 °C to 60 °C and a static-pressure range from 110 kPa to 200 kPa.