Abstract
This is a reply to the preceding comment by E N Franklin titled `Isoxygen a detachment-dominated gas or not?' on our earlier work `On the plasmaparameters of a planar inductive discharge' (2000 J. Phys. D: Appl. Phys. 33 1323). We showthat the density of the metastable oxygen molecule O2(a1Δg) issignificant in low pressure high density discharge. Furthermore, wedemonstrate that detachment has little influence on the electron density,electron temperature and the overall density of negative ions at these lowpressures (1-20 mTorr).
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