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Abstract
Micromachined gyroscopes require high voltage (HV) for actuation and detection to improve its precision, but the deviation of the HV caused by temperature fluctuations will degrade the sensor’s performance. In this paper, a high-voltage temperature-insensitive charge pump is proposed. Without adopting BCD (bipolar-CMOS-DMOS) technology, the output voltage can be boosted over the breakdown voltage of n-well/substrate diode using triple-well NMOS (n-type metal-oxide-semiconductor) transistors. By controlling the pumping clock’s amplitude continuously, closed-loop regulation is realized to reduce the output voltage’s sensitivity to temperature changes. Besides, the output level is programmable linearly in a large range by changing the reference voltage. The whole circuit has been fabricated in a 0.18-m standard CMOS (complementary metal-oxide-semiconductor) process with a total area of 2.53 mm. Measurements indicate that its output voltage has a linear adjustable range from around 13 V to 16.95 V, and temperature tests show that the maximum variations of the output voltage at are less than 1.1%.
Highlights
Micromachined gyroscopes are widely used for sensing rotation in many applications, such as integrated navigation, automotive safety and portable devices [1,2]
high voltage driving (HV) can be utilized in gyroscope circuits for quadrature compensation and electrostatic force balance, to acquire better accuracy, broader measurement range and larger scale factor [6,7,8,9]
As there has been a trend of miniaturization and integration of the electronic interface along with the development of micro gyroscopes, HV generator is expected to be built on-chip to mitigate the complexity of the circuit and reduce power consumption [10,11]
Summary
Micromachined gyroscopes are widely used for sensing rotation in many applications, such as integrated navigation, automotive safety and portable devices [1,2]. Angular rate information is sensed by Coriolis effect on the vibrating mass of micro gyroscope with electrical actuation [3,4]. As there has been a trend of miniaturization and integration of the electronic interface along with the development of micro gyroscopes, HV generator is expected to be built on-chip to mitigate the complexity of the circuit and reduce power consumption [10,11]. Temperature insensitivity is a key factor in developing practical micro-gyroscope system into high-precision application area [15]. For an unregulated charge pump, environmental factors such as temperature fluctuations will cause non-negligible variations at the Sensors 2019, 19, 4149; doi:10.3390/s19194149 www.mdpi.com/journal/sensors
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