Abstract
Abstract A critical re-examination has been made of the boundary layer theory for diffusion limited growth in a horizontal CVD reactor, and closed form expressions for the growth rate determined using several approximations. These have been used to find the boundary layer thickness, based on a diffusion model; the results have been compared to the boundary layer thickness which is based on a velocity model. It is shown that these boundary layer thicknesses are proportional over certain regimes of operation, beyond which the growth rate drops off exponentially with distance. Finally, the limits of accuracy for the boundary layer theory were determined by comparison with numerical computations.
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