Abstract
A high intensity, plasma-sputter, negative ion source, which utilizes multicusp, magnetic-field, plasma confinement techniques is described. The source is an axial-geometry version of a radial-geometry source which has demonstrated a pulsed-mode peak intensity level of several mA for a wide spectrum of heavy negative ion species. The mechanical design features include provisions for fast interchange of sputter samples, ease of maintenance, direct cooling of the discharge chamber, and the use of easily replaced coaxial LaB6 cathodes.
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