Abstract

A one-dimensional model of weakly ionised plasmas of pure hydrogen has been developed, which allows to describe the plasma dynamics, the ionisation and dissociation kinetics. The model consists of a state to state, reaction diffusion model which includes eV, EV, VV, VT, dissociation and attachment processes over the vibrational ladder of H 2 ( X 1Σ g + , v=0, 14). The plasma kinetics is described by the Particle in Cell method with Monte Carlo Collisions applied to electrons and four ion species (H 3 +, H 2 +, H +, and H −). The electron/molecule process rates are calculated as a function of position taking into account the translational non-equilibrium of electrons and the vibrational non-equilibrium of molecules. As a case study we consider a parallel plate, radio frequency discharge plasma. Results are shown for two different values of the gas pressure. The role of collisional and electrostatic phenomena is discussed in the light of experimental results.

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