Abstract
This work presents a one-dimensional magnetic chip composed of a hybrid magnetosensor and a readout circuit, which were fabricated with 0.18 μm 1P6M CMOS technology. The proposed magnetosensor includes a polysilicon cross-shaped Hall plate and two separated metal-oxide semiconductor field-effect transistors (MOSFETs) to sense the magnetic induction perpendicular to the chip surface. The readout circuit, which comprises a current-to-voltage converter, a low-pass filter, and an instrumentation amplifier, is designed to amplify the output Hall voltage with a gain of 43 dB. Furthermore, a SPICE macro model is proposed to predict the sensor’s performance in advance and to ensure sufficient comprehension of the magnetic mechanism of the proposed magnetosensor. Both simulated and measured results verify the correctness and flexibility of the proposed SPICE macro model. Measurements reveal that the maximum output Hall voltage VH, the optimum current-related magnetosensitivity SRI, the optimum voltage-related magnetosensitivity SRV, the averaged nonlinearity error NLE, and the relative bias current Ibias are 4.381 mV, 520.5 V/A·T, 40.04 V/V·T, 7.19%, and 200 μA, respectively, for the proposed 1-D magnetic chip with a readout circuit of 43 dB. The averaged NLE is small at high magnetic inductions of ±30 mT, whereas it is large at low magnetic inductions of ±30 G.
Highlights
The Hall plate is a type of a CMOS magnetic induction sensor that can sense the magnetic induction perpendicular to the sensor plate surface and convert it into a corresponding electrical signal such as voltage, current, or frequency [1,2,3]
The physical mechanism is proposed to involve the Lorentz force FX pushing the positive charge right to gather it at the right side of the polysilicon cross-shaped Hall plate (CSHP), which is connected to the gate terminal of the second metal-oxide semiconductor field-effect transistors (MOSFETs) M2
The physical mechanism involves the Lorentz force pushing the positive charge right to gather it at the right side of the polysilicon CSHP, which is connected to the gate terminal of the second MOSFET
Summary
The Hall plate is a type of a CMOS magnetic induction sensor that can sense the magnetic induction perpendicular to the sensor plate surface and convert it into a corresponding electrical signal such as voltage, current, or frequency [1,2,3]. The hybrid magnetosensor has been developed to have a large output Hall current, which is the drain current of MOSFET whose gate is biased with a polysilicon CSHP in voltage mode. This paper proposes a hybrid magnetosensor composed of a polysilicon CSHP and a pair of identical MOSFETs. The MOSFET enhances the magnetic sensitivity with a quadratic equation of the induced Hall voltage at the polysilicon CSHP, and the strip structure with two separated sources improves the biasing current. This paper proposes a SPICE macro model that is suitable for detecting the magnetic induction in voltage mode [16, 17]. Both simulated and measured results are provided to verify the correctness and flexibility of the proposed SPICE macro model.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
