Abstract
Direct observation of surface reconstruction under reflection electron micros-copy(REM) provides an intimate insight into basic processes on the surface, leading to more comprehensive understanding of surface physics in atomic scale. For this purpose we have developed a special UHV-specimen chamber, which allows various types of attachments, e.g., evaporator, ion gun, cooling facility, gas inlet and STM if necessary, to be mounted. This chamber was mounted in a 200kV transmission electron micro scope(TEM), Hitachi H-700H, to construct a novel UHV-REM for surface study.Fig.l shows a schematic diagram of the UHV-TEM constructed in the present work. The specimen chamber is evacuated with turbomolecular pump and Ti sublimation pump to the vacuum pressure of ~10-9 Torr. Some additional ports for, evaporator, gas-inlet, etc. are also attached around the specimen stage. Feedthrough metal bellows for driving system allows specimen holder to be translated in X- and Y-directions and to be tilted against electron beam without deterioration of vacuum pressure.
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