Abstract

To meet the urgent need for a new design concept and solve the inaccuracy of existing performance prediction algorithms for high-speed turbomolecular pumps (TMPs), a new algorithm based on a novel twisted rotor blade is proposed. In this algorithm, the blade angle of the turbine rotor row progressively decreases from the root to the tip of the blade tooth. The feasibility and accuracy of the simulation algorithm were verified through experiments. The dependence of the simulation results on the number of simulated molecules was discussed. Both theoretical analysis and simulations confirmed the necessity of setting a twisted rotor blade in the turbine combined blade row. A comparative analysis on the performance of conventional straight-blade and twisted-blade structures based on the first-four stages of turbine combined blade rows of the F-63/55 TMP was conducted. The results indicated that the maximum pumping speed coefficient and maximum compression ratio of the optimised twisted-blade structure increased by 4.59% and 22.26%, respectively. This novel blade structure overcomes the limitations of the conventional straight-blade structure. Progressively decreasing the rotor blade angle from the root to the tip of the blade tooth is beneficial for improving the performance of TMPs. This study provides a new design concept and performance prediction algorithm for the structural optimisation of high-speed TMPs.

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